Features of Diffused Silicon Pressure Sensors

Features of Diffused Silicon Pressure Sensor UPX19

1. It is suitable for making small-scale transmitters: the piezoresistive effect of the force-sensitive resistance of the silicon chip has no dead zone in the low-range section near the zero point, and the range of the pressure sensor can be as small as several Kpa.

2. High output sensitivity: The sensitivity factor of silicon strain resistance is 50 to 100 times higher than that of metal strain gauges, so the sensitivity of the corresponding sensor is very high, and the general range output is about 100mv. Therefore, there are no special requirements for the interface circuit, and it is more convenient to use.

3. High precision: Because the sensor's feeling, sensitive conversion and detection are realized by the same component, there is no intermediate conversion link, and the repeatability and hysteresis error are small. Since the monocrystalline silicon itself is very rigid and the deformation is small, good linearity is ensured.

4. Since the unisexual deformation of the work is as low as the order of micro-strain, the maximum displacement of the elastic chip is in the order of sub-micron, so there is no wear, no fatigue, no aging, and the service life is as long as 1×103 pressure cycle, with stable performance and high reliability.

5. Due to the excellent chemical corrosion resistance of silicon, even non-isolated diffused silicon pressure sensors have the ability to adapt to various media to a considerable extent.

6. Since the chip adopts an integrated process and has no transmission parts, it is small in size and light in weight.

For details, please contact Stella Meng.