Introduction of Sputtered Thin-film Pressure Sensor

Jun 03, 2025

Alloy film pressure sensor uses sputtering, evaporation and other methods to deposit thin film strain resistors on a metal elastic substrate. It has high precision, good creep resistance, strong anti-interference, good temperature characteristics and a wide application temperature range.

The working principle of alloy film is the "strain-resistance effect". When the elastic sensitive element is subjected to a certain pressure, it undergoes a slight mechanical deformation, which causes the alloy film on the sensitive element to deform, and eventually the resistance of the alloy film changes. Through the bridge circuit, the resistance change is converted into a stable voltage change.

Our UPC9 sputtered thin-film pressure transducer is manufactured based on sputtering technics. The pressure medium can act on 17-4PH stainless steel diaphragm directly. The transducer's "micro" level resistance film is made by means of molecular bonding, then to be made to the needed Wheatstone bridge by microelectronics technology , and to form a metal type sensing elements without using any adhesives. Therefore the transducer has no any moving parts, also do not need sealed chamber and oil-filled cavity. UPC9 pressure transducer is featured with good long-term stability for working is harsh environments.

Any interest, please contact Stella Meng: stellameng@utopsensor.com.