Do you know the difference between silicon and ceramic diaphragm of pressure sensors?

May 17, 2019

We have several types of pressure sensor with different diaphragm material. They have the difference and similarities. You can find the features of some of them as follows:

Metal capacitive pressure sensor type UIB3351

Advantages: high precision (can reach 0.075%FS~0.25%FS), large range ratio, conventional 20:1 (high precision can reach 100:1), good stability (The temperature drift of zero and full span does not exceed 0.2~0.5%FS), strong anti-interference and anti-overload ability (can reach 50~100 times overload and will not damage the diaphragm of the pressure sensor).

Piezoresistive silicon pressure sensor UPB13

Advantages: high precision (can reach 0.1%FS), good stability (The temperature drift of zero and full span does not exceed 0.25%FS), good anti-interference and anti-overload ability (can withstand 4 times overload and will not damage the diaphragm of the pressure transmitter) .

Ceramic pressure sensor type UPB3

Advantages: high precision (up to 0.25%FS), good stability (The temperature drift of zero and full span does not exceed 0.5%FS), good anti-interference and overload resistance ability (can withstand 3 times overload and will not damage the diaphragm).

However, with superior anti-corrosion feature, ceramic diaphragm can withstand long-term corrosion of strong acid and alkali.

Ceramic capacitor

Advantages: high precision (can reach 0.1%FS), good stability (The temperature drift of zero and full span does not exceed 0.25%FS), good anti-interference and anti-overload ability (can withstand 10 times overload and will not damage the diaphragm).

However, with superior anti-corrosion feature, ceramic diaphragm can withstand long-term corrosion of strong acid and alkali.

Single crystal silicon

Please contact Qi Huang(qihuang@utopsensor.com) for more details.