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Silicon Pressure Sensor

1. Computer tested, high precise compensation.
2. Good performance, high reliability.
3. Imported pressure silicon dies.
4. Isolated-type structure, suitable for many kinds of media measurement.
5. Pressure range: -1...0~0.2...100 bar.

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Silicon Pressure Sensor

Description of Silicon Pressure Sensor

Based on silicon piezoresistive technology, UPX6-a, -b, and -c are manufactured by adopting high quality piezoresistive silicon chips.

UPX6-a silicon piezoresistive pressure sensor is the ultra-thin design based on UPX19 foundation.

UPX6-b silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. It is designed for application of high pressure situation. Its small diameter causes  the strength on the sensor body reduce greatly after installation.

UPX6-c silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. Except their outer diameters and lengths, other technical specifications of these sensors are completely same.

Features of Silicon Pressure Sensor

◇Computer tested, high precise compensation

◇Good performance, high reliability

◇Imported pressure silicon dies

◇Isolated-type structure, suitable for many kinds of media measurement

Specifications of Silicon Pressure Sensor

pressure mediumgas or liquid compatible to stainless steel

pressure ranges

-1...0~0.2...100 bar (UPX6-a  G, A, S)                                  

0~10...1000 bar      (UPX6-b A, S)                                        

-1...0~0.4...400bar  (UPX6-c G A S)

pressure typegauge(G), absolute(A), sealed gauge(S)
overload pressure150%FS
output signal≥70mV(typical)
accuracy0.25%FS(standard), 0.5%FS
zero offset≤±2mV
long-term stability<0.2%FS/year
excitation1.5mA or 10V DC (1.5mA standard)
compensated temperature range-10~+70℃
operating temperature range-40~+100℃
storage temperature range-40~+100℃
temperature coefficient of zero0.2%FS/10℃
temperature coefficient of span0.2%FS/10℃
input/output resistance2~6kΩ
insulation resistance100MΩ@50VDC
electrical connection6 pin or 4wires
material of pressure membrane and housing316L
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