Characteristics of Diffused Silicon Pressure Sensors

Compared with sensors of other principles, diffused silicon pressure sensors have the following characteristics:

1. Suitable for making small-range sensors. The piezoresistive effect of the force sensitive resistor of the silicon chip has no dead zone in the low range near zero, and the range of the pressure sensor can be as small as several Kpa.

2. High output sensitivity. The sensitivity factor of silicon strain resistance is 50-100 times higher than that of metal strain gauge, so the sensitivity of the corresponding sensor is very high, and the general range output is about 100mv. Therefore, there is no special requirement for the interface circuit, and it is more convenient to use.

3. High precision. Since the sensing, sensitive conversion and detection of the sensor are realized by the same component, there is no intermediate conversion link, and the repeatability and hysteresis errors are small. Since the monocrystalline silicon itself has great rigidity and little deformation, good linearity is guaranteed. 

4. Due to the low deformation of the working unitary to the order of micro-strain, the maximum displacement of the elastic chip is in the order of sub-micron, so there is no wear, no fatigue, no aging, and the service life is as long as 1×103 pressure cycles, with stable performance and high reliability.

5. Due to the excellent chemical anti-corrosion performance of silicon, even non-isolated diffused silicon pressure sensors have a considerable degree of ability to adapt to various media.

6. Since the chip adopts integrated technology and has no transmission parts, it is small in size and light in weight.

Any question about our UPB1 silicon pressure transmitter, please contact Stella Meng.